Abstract: Monte Carlo simulation was conducted for energy of incident ions between 0.1 and 10.0 MeV to investigate irradiation damage in CaCeTi₂O₇. Results show that, during alpha particle incident, around 10-23 vacancies can be generated at per nanometre thickness, the depth of damage zone is in the range of 0.43-40.32 μm, and energy is lost mainly by electronic interactions. During Kr⁺ incident, around 106-2 488 vacancies can be generated at per nanometre thickness, and the depth of damage zone is in the range of 0.04-2.76 μm. As the energy of incident particles increases, the nuclear stopping power decreases, the electron stopping power increases, and the energy loss mode changes from phonon energy loss to ionization energy loss. When the incident increases from 0 to 75 degree, during alpha particle incident, the depth of damage zone decreases from 14.5 μm to 4.0 μm, during Kr⁺ incident, the depth of damage zone decreases from 1.57 μm to 0.2 μm.