Abstract: Surface-enhanced Raman scattering(SERS) is a new trace analysis technology with high sensitivity, low sample dosage and easy identification of characteristic spectrum, especially suitable for the detection of dangerous chemicals such as uranyl ions. Over the past decade, nanomaterials and nanotechnology have made great progress in the application of emerging technologies and SERS, leading to the advanced nanomaterial synthesis methods being introduced into SERS field. This paper summarizes a series of high-quality 3D array nanomaterials SERS substrates based on lithography, atomic layer deposition, etc., as well as their applications in the detection of trace uranyl ions. Especially, three-dimensional silver nanorods arrays coated with inert oxides(Al₂O₃, HfO₂, etc.) possess high sensitivity and outstanding stability, and the detection limit of uranyl ions is as low as nanomolar magnitude. Besides, multiple uranyl species could be identified on these substrates according to the differences of characteristic Raman vibration frequency, which has great potential practical applications.