Abstract: The three processes of preparing boron powder were described through boron trifluoride as raw materials using metal thermal reduction, molten salt electrolysis and vapor deposition, respectively. The purity, yield, advantages and disadvantages of boron powder prepared by each processe were analyzed and compared. A boron powder preparation process that was prepared from borane using boron trifluoride as raw materials by fluid bed-chemical vapor deposition method was proposed with high efficiency, low energy and easy industrialization.