Abstract: For studying the depth profiles of tritium of contaminated copper and 316L stainless steel after adsorbing tritium and the methods to decontaminate the metals, the specimens adsorbed tritium and then were etched by an acid mixture, decontaminated by exposed to air, UV or ozone while heating or only by heating. The results show that at a depth of <1 μm, the total concentration of tritium is particularly high, the proportion is about 42%; based on the thermal desorption and being exposed to O₃, the cleaning method has been observed to reduce the amount of absorbed tritium by a factor of 286 for the stainless steel, while it is 150 for copper. All tritium could be released thermally at temperatures 500℃ or above, while the type of carrier gas had impact on the decontamination at moderate temperature. The results indicate that four adsorption states of tritium exit in the contaminated stainless steel.