Abstract: The isotopes of 66,67Ge are produced by bombarding natural Ni target with 12C ion at 72.5 MeV. The nuclear reaction products are transported as far as 8 m with He-jet system and separated in the gaseous phase. The separating conditions of Ge isotopes are studied in detail with AgCl at 600℃ as an additive and with He as carrier gas at 1.2 atm,The experimental results show that the isotopes of Ge are separated satisfactorily from nuclear reaction products within 10 minutes and their adsoption yields are above 60%. The decontamination factors of As and Ga are (8.21±3.53)×102 and (1.52±0.27)×102 respectively.