Abstract: DEVELOPMENT OF A TOTAL REFLECTION X-RAY FLUORESCENCE ANALYSIS EQUIPMENT WITH DETECTION LIMITS OF SUBNANOGRAM LEVELJin Liyun;Huang Qingliang;Li Yun;Yuan Hui;Gao Hong（China Institute of Atomic Energy,P. O.Box 275（88）,Beijing 102413)Abstract:This paper describes the structure and performance of a self-made total reflection X-ray fluorescence analysis equipment with detection limits of subnanogram level．This equipment consists of three main parts：a generator of Shimadzu XD-1 X－ray diffractometer with a Cu anode X－ray tube already present in the lab, a flexible TXRF attachment imported from Austria,and a Si（Li）detector multichannel analysis system supplied by the department of applied nuclear technique, Advanced software SPAN／XRF V 4．0 for processing X-ray spec tra developed simultaneously is applied. The test results indicate that the detection limits for elements of atomic number 16—28 at subnanogram level are reached.Keywords:TXRF analysis Si（Li）detector Minimun detection limit