Abstract: The depth distribution of tritium in stainless steel was measured by chemical etching. The results show that the method can more quantitatively evaluate the tritium distributing in stainless steel. The maximum amount of tritium which distributed in crystal lattice of stainless steel is limitted by its solubility at room temperature. The other form of tritium in stainless steel is gaseous tritium that are trapped by defects, impurities, fractures, etc. within it. The gaseous tritium is several times more than the soliddissolved tritium.